| |
LOSOID CRL 22680
Lubricants for the Cleanroom Technology
Introduction
The lubricants described in this data sheet belongs to the LOSIMOL Cleanroom Lubricants Series,especially developed for the requirements of the cleanroom technology (e.g. semiconductor manufacturing). This means that the cleanroom lubricants not only correspond to usual tribological characteristics but also to the specific requriements of cleanroom technology like number and size of particles. Therefore LOSIMOL Cleanroom Lubricants are classified according to these two items.
Cleanroom Characteristics
The determination of the results of the particle emission behaviour and particle size distribution has been done under standardised conditions. A wafer positioning unit of a semiconductor inspection equipment served as a test stand.
General Technical Data Regarding LOSOID CRL 22680£º
Penetration Worked (Consistency) 230/250
Apparent Dynamic Viscosity mPa.s (cP) abt.4.750 cP
Ductility fair
Evaporation Loss 0.4%-16h/70¡ãC
Spreading Behaviour Sp=155/70¡ãC
Operating Temperature Range abt.-20¡ãC/+85¡ãC
Resistant Plastics PA,PC,POM,
Remarks:
The quoted data are the average of serveral tests on different production lots. Our deliveries are being effected according to these specifications within permitted tolerances.
All the information given is correct, to the best of our knowledge and belief.Our information does not remove the responsibility from the customers to verify that our product is suitable for their particular demand. |
|
|
